Gallium nitride-based led fabrication with pvd-formed aluminum nitride buffer layer

ABSTRACT

Fabrication of gallium nitride-based light emitting diodes (LEDs) with physical vapor deposition (PVD) formed aluminum nitride buffer layers is described.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.13/036,273, filed Feb. 28, 2011, which claims the benefit of U.S.Provisional Application No. 61/424,006, filed Dec. 16, 2010, the entirecontents of which are hereby incorporated by reference herein.

BACKGROUND

1) Field

Embodiments of the present invention pertain to the field of groupIII-nitride materials and, in particular, to the fabrication of galliumnitride-based light emitting diodes (LEDs) with physical vapordeposition (PVD) formed aluminum nitride buffer layers.

2) Description of Related Art

Group III-V materials are playing an ever increasing role in thesemiconductor and related, e.g. light-emitting diode (LED), industries.Often, group III-V materials are difficult to grow or deposit on foreignsubstrates (known as heteroepitaxy) without the formation of defects orcracks. For example, high quality surface preservation of select films,e.g. a gallium nitride film, is not straightforward in many applicationsusing stacks of material layers fabricated sequentially. The inclusionof one or more buffer layers between a substrate and a device layer hasbeen one approach. However, group III-V materials are often sensitive toprocess conditions and care must be taken to avoid such conditions atparticular periods of the fabrication process. Avoiding interaction of asensitive group III-V film with potential damaging conditions, however,is also not straightforward in many applications

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a benchmark cluster tool schematic, a benchmark LEDstructure, and a benchmark time-to-deposition plot, in accordance withone or more embodiments of the present invention.

FIG. 2A illustrates a cluster tool schematic and a correspondingtemperature versus time plot for LED structure fabrication, inaccordance with an embodiment of the present invention.

FIG. 2B illustrates a light-emitting diode (LED) structure and acorresponding time-to-deposition plot, in accordance with an embodimentof the present invention.

FIG. 3 is a Flowchart representing operations in a method of fabricatinga gallium nitride-based light LED with a PVD-formed aluminum nitridebuffer layer, in accordance with an embodiment of the present invention.

FIG. 4 is a schematic cross-sectional view of a MOCVD chamber suitablefor the fabrication of group III-nitride materials, in accordance withan embodiment of the present invention.

FIG. 5 is a schematic cross-sectional view of a HVPE chamber suitablefor the fabrication of group III-nitride materials, in accordance withan embodiment of the present invention.

FIG. 6 illustrates a cross-sectional view of a gallium nitride(GaN)-based light-emitting diode (LED) formed on a metalized substrate,in accordance with an embodiment of the present invention.

DETAILED DESCRIPTION

The fabrication of gallium nitride-based light emitting diodes (LEDs)with physical vapor deposition (PVD) formed aluminum nitride bufferlayers is described. In the following description, numerous specificdetails are set forth, such as process chamber configurations andmaterial regimes, in order to provide a thorough understanding ofembodiments of the present invention. It will be apparent to one skilledin the art that embodiments of the present invention may be practicedwithout these specific details. In other instances, well-known features,such as specific diode configurations, are not described in detail inorder to not unnecessarily obscure embodiments of the present invention.Furthermore, it is to be understood that the various embodiments shownin the Figures are illustrative representations and are not necessarilydrawn to scale. Additionally, other arrangements and configurations maynot be explicitly disclosed in embodiments herein, but are stillconsidered to be within the spirit and scope of the invention.

An LED method of fabrication can include the formation of a buffer layerof gallium nitride between a substrate and a device layer of un-dopedand/or doped gallium nitride. In embodiments described herein, analuminum nitride buffer layer is used in place of such a gallium nitridebuffer layer, between the substrate and the device layer of un-doped anddoped gallium nitride. The aluminum nitride layer may be formed bysputter deposition in a PVD process. This is in contrast to thefabrication of group III-nitride buffer layers which is typicallyperformed in a metal-organic vapor deposition (MOCVD) chamber or ahydride vapor phase epitaxy (HVPE) chamber. The aluminum nitride layermay be formed by non-reactive sputtering from an aluminum nitride targethoused in the PVD chamber or, alternatively, may be formed by reactivesputtering from an aluminum target housed in the PVD chamber and reactedwith a nitrogen-based gas or plasma.

One or more of the embodiments described herein may enable higherthroughput in a multi-chamber fabrication tool used for LED fabrication.Also, by including a PVD-formed aluminum nitride layer instead of agallium nitride buffer layer, the device layer of un-doped and dopedgallium nitride may be thinned overall. In a particular example, theun-doped portion may be thinned or eliminated altogether. Furthermore,preliminary sputter cleaning of a receiving substrate, such as asapphire substrate, may be performed in the same PVD deposition chamberas is used to deposit the aluminum nitride layer. Additionally, theoverall thermal budget of LED fabrication may be reduced since the PVDaluminum nitride layer may be formed at temperatures below 300 degreesCelsius. By contrast, a typical gallium nitride buffer layer is formedbetween 500-600 degrees Celsius. One or more of the embodimentsdescribed herein may enable faster deposition rates, e.g. two times thegrowth rate, for materials such as un-doped and/or n-type doped galliumnitride. Faster rates may be achieved since, in some embodiments, theun-doped and/or n-type doped gallium nitride layers are formed on analuminum nitride (AlN) buffer layer which may provide a correct crystalorientation and morphological relationship for growing un-doped and/orn-type doped gallium nitride layers thereon. One or more of theembodiments described herein may enable elimination of oxide removaloperations since many of the described operations are performed in-situin a cluster tool. One or more of the embodiments described herein mayenable an improvement of gallium nitride crystalline quality by formingthe gallium nitride on a PVD-formed aluminum nitride buffer layer.

Described in association with one or more embodiments herein are systemsfor the fabrication of gallium nitride-based LEDs with PVD-formedaluminum nitride buffer layers. In one embodiment, a multi-chambersystem includes a PVD chamber having a target composed of a metallic orcompound of aluminum. The multi-chamber system also includes chambersadapted to deposit un-doped or n-type gallium nitride, or both, and forother device layers such as multiple quantum well layers and p-typedoped gallium nitride layers.

Also described in association with one or more embodiments herein aremethods of fabricating gallium nitride-based LEDs with PVD-formedaluminum nitride buffer layers. In one embodiment, a method offabricating a LED structure includes forming an aluminum nitride layerabove a substrate in a PVD chamber of a multi-chamber system. The methodalso includes forming an un-doped or n-type gallium nitride layer on thealuminum nitride layer in a second chamber of the multi-chamber system.

Embodiments of the present invention may provide improvements over abenchmark system or methodology developed during studies of thepresently described systems and methodologies. For example, FIG. 1illustrates a benchmark cluster tool schematic, a benchmark LEDstructure, and a benchmark time-to-deposition plot, in accordance withone or more embodiments of the present invention.

Referring to FIG. 1, a benchmark cluster tool 100 includes an un-dopedand/or n-type gallium nitride MOCVD reaction chamber 102 (MOCVD1:u-GaN/n-GaN), a multiple quantum well (MQW) MOCVD reaction chamber 104(MOCVD2: MQW), and a p-type gallium nitride MOCVD reaction chamber 106(MOCVD3: p-GaN). The benchmark cluster tool 100 may also include a loadlock 108, a carrier cassette 110, and an optional additional un-dopedand/or n-type gallium nitride MOCVD reaction chamber 112 for high volumeapplications, all of which are depicted in FIG. 1.

A benchmark LED structure 120 includes a stack of various materiallayers, many of which include III-V materials. For example, thebenchmark LED structure 120 includes a silicon or sapphire substrate 122(Substrate: sapphire, Si), a 20 nanometer thick buffer layer 124 (LTbuffer), and an approximately 4 microns thick un-doped/n-type galliumnitride combination layer 126 (u-GaN/n-GaN). The buffer layer 124 may bea gallium nitride layer formed at relatively low processingtemperatures. The buffer layer 124 and the un-doped/n-type galliumnitride combination layer 126 are formed in un-doped and/or n-typegallium nitride MOCVD reaction chamber 102 of benchmark cluster tool100. The benchmark LED structure 120 also includes an MQW structure 128with a thickness in the range of 30-500 nanometers. The MQW structure128 is formed in MQW MOCVD reaction chamber 104 of benchmark clustertool 100. The benchmark LED structure 120 also includes an approximately20 nanometers thick p-type gallium aluminum nitride layer 130 (p-AlGaN)and a p-type gallium nitride layer 132 with a thickness in the range of50-200 nanometers (p-GaN). The p-type gallium aluminum nitride layer 130and the p-type gallium nitride layer 132 are formed in p-type galliumnitride MOCVD reaction chamber 106 of benchmark cluster tool 100.

A benchmark time-to-deposition plot 140 represents chamber usage inbenchmark cluster tool 100. The formation of the MQW structure 128 inMQW MOCVD reaction chamber 104 has a growth time of approximately 2hours. And, the formation of the p-type gallium aluminum nitride layer130 and the p-type gallium nitride layer 132 in p-type gallium nitrideMOCVD reaction chamber 106 has a growth time of approximately 1 hour.Meanwhile, the formation of the buffer layer 124 and the un-doped/n-typegallium nitride combination layer 126 in un-doped and/or n-type galliumnitride MOCVD reaction chamber 102 has a growth time of approximately3.5 hours. An additional approximately 1 hour may be required forchamber cleaning of chamber 102. Thus, overall, the cycle time forfabricating benchmark LED structure 120 in benchmark cluster tool 100 isdictated by the cycle time of un-doped and/or n-type gallium nitrideMOCVD reaction chamber 102, which is approximately 4.5 hours. It is tobe understood that cleaning time may, but need not, include time forshut-down, plus clean time, plus recovery time. It is also to beunderstood that the above may represent an average since cleaning maynot be performed between every chamber usage.

A benchmark timing sequence for LED material deposition specific to theformation of the buffer layer 124 and the un-doped/n-type galliumnitride combination layer 126 in un-doped and/or n-type gallium nitrideMOCVD reaction chamber 102, as described in association with FIG. 1, isprovided below. For example, the growth time of approximately 3.5 hoursis broken into a 10 minute high temperature treatment of a sapphiresubstrate, a 5 minute low temperature formation of a buffer layer, a 10minute buffer annealing operation, a 30 minute growth recoveryoperation, a 2 hour un-doped/n-type gallium nitride combination layerformation operation, and a 30 minute temperature ramp and stabilizationoperation (e.g., temp ramp 2-3° C./s).

In reference to the benchmark systems and methodologies described inassociation with FIG. 1, the benchmark approach may result in anunbalanced time flow for each functioning layer of the LED. For example,formation of the buffer layer 124 and the un-doped/n-type galliumnitride combination layer 126 in un-doped and/or n-type gallium nitrideMOCVD reaction chamber 102 is 3.5 hrs, formation of the MQW structure128 in MQW MOCVD reaction chamber 104 is 2 hours, and formation of thep-type gallium aluminum nitride layer 130 and the p-type gallium nitridelayer 132 in p-type gallium nitride MOCVD reaction chamber 106 is 1hour. Furthermore, as mentioned above, an additional approximately 1hour of chamber cleaning (possibly including pump-down times) may berequired between runs in un-doped and/or n-type gallium nitride MOCVDreaction chamber 102. Such additional chamber cleaning may be requiredto avoid substrate contamination. As such, the progressive growth of thestructure 120 with three MOCVD chambers results in significant idle timefor the MQW MOCVD reaction chamber 104 and the p-type gallium nitrideMOCVD reaction chamber 106, reducing the overall throughput of thesystem 100.

In an aspect of the present invention, the throughput of a clustersystem for fabricating LED structures may be improved by substitutingone of or a portion of one of the above described MOCVD material growthcapabilities or operations with a PVD sputtering deposition capabilityor operation. For example, FIG. 2A illustrates a cluster tool schematicand a corresponding temperature versus time plot for LED structurefabrication, in accordance with an embodiment of the present invention.FIG. 2B illustrates an LED structure and a correspondingtime-to-deposition plot, in accordance with an embodiment of the presentinvention.

Referring to FIG. 2A, a cluster tool 200 includes a PVD aluminum nitridesputter chamber 202 (PVD AlN), an un-doped and/or n-type gallium nitrideMOCVD reaction chamber 204 (MOCVD1: u-GaN/n-GaN), a multiple quantumwell (MQW) MOCVD reaction chamber 206 (MOCVD2: MQW), and a p-typegallium nitride MOCVD reaction chamber 208 (MOCVD3: p-GaN). The clustertool 200 may also include a load lock 210, a carrier cassette 212, and atransfer chamber 214, all of which are depicted in FIG. 2A.

Thus, in accordance with an embodiment of the present invention, amulti-chamber system includes a PVD chamber having a target of metallicor compound aluminum, and a chamber adapted to deposit un-doped and/orn-type gallium nitride, or both. In one embodiment, the target of thePVD chamber is composed of aluminum nitride. In such an embodiment,reactive sputtering need not be used since the target is composed of thesame material desired for deposition. However, in an alternativeembodiment, a target composed of aluminum is used, and aluminum nitrideis reactively sputtered from the aluminum target by or in the presenceof a nitrogen source. In one embodiment, the chamber adapted to depositun-doped or n-type gallium nitride is a MOCVD chamber, as depicted inFIG. 2A. However, in an alternative embodiment, the chamber adapted todeposit un-doped or n-type gallium nitride is a hydride vapor phaseepitaxy (HVPE) chamber. In one embodiment, the PVD chamber and thechamber adapted to deposit un-doped or n-type gallium nitride areincluded in a cluster tool arrangement, as depicted in FIG. 2A. However,in an alternative embodiment, the PVD chamber and the chamber adapted todeposit un-doped or n-type gallium nitride are included in an in-linetool arrangement. Deposition processes based on PVD, as describedherein, may be performed at temperatures approximating standard roomtemperature, or may be performed at higher temperatures.

Referring to FIG. 2B, a LED structure 220 includes a stack of variousmaterial layers, many of which include III-V materials. For example, theLED structure 220 includes a silicon or sapphire substrate 222(Substrate: sapphire, Si) and an aluminum nitride layer 224 (AlN) with athickness approximately in the range of 10-200 nanometers. The aluminumnitride layer 224 is formed by sputter deposition in the PVD aluminumnitride sputter chamber 202 of cluster tool 200. The LED structure 220also includes an approximately 4 microns thick un-doped/n-type galliumnitride combination or n-type gallium nitride-only layer 226 (n-GaN).The un-doped/n-type gallium nitride combination or n-type galliumnitride-only layer 226 is formed in un-doped and/or n-type galliumnitride MOCVD reaction chamber 204 of cluster tool 200. The LEDstructure 220 also includes an MQW structure 228 with a thickness in therange of 30-500 nanometers. The MQW structure 228 is formed in MQW MOCVDreaction chamber 206 of cluster tool 200. In one embodiment, the MQWstructure 228 is composed of one or a plurality of field pairs of InGaNwell/GaN barrier material layers. The LED structure 220 also includes anapproximately 20 nanometers thick p-type gallium aluminum nitride layer230 (p-AlGaN) and a p-type gallium nitride layer 232 with a thickness inthe range of 50-200 nanometers (p-GaN). The p-type gallium aluminumnitride layer 230 and the p-type gallium nitride layer 232 are formed inp-type gallium nitride MOCVD reaction chamber 208 of cluster tool 200.It is to be understood that the above thicknesses or thickness rangesare exemplary embodiments, and that other suitable thicknesses orthickness ranges are also considered within the spirit and scope ofembodiments of the present invention.

A time-to-deposition plot 240 represents chamber usage in cluster tool200. The formation of the MQW structure 228 in MQW MOCVD reactionchamber 206 has a growth time of approximately 2 hours. The formation ofthe p-type gallium aluminum nitride layer 230 and the p-type galliumnitride layer 232 in p-type gallium nitride MOCVD reaction chamber 208has a growth time of approximately 1 hour. And, in accordance with anembodiment of the present invention, the formation of theun-doped/n-type gallium nitride combination or n-type galliumnitride-only layer 226 in un-doped and/or n-type gallium nitride MOCVDreaction chamber 204 has a growth time of only approximately 2 hours. Anadditional approximately 1 hour may be required for chamber cleaning ofchamber 204. It is to be understood, however, that cleaning time mayinclude time for shut-down, plus clean time, plus recovery time. It isalso to be understood that the above may represent an average sincecleaning may not be performed between every chamber usage.

Thus, instead of forming a buffer layer, such as buffer layer 124 ofFIG. 1, in the MOCVD chamber used to form gallium nitride layer 126, analuminum nitride buffer layer 224 is instead included and is formed inanother chamber, specifically in PVD aluminum nitride sputter chamber202. Although the AlN growth may be for a duration of approximately 5minutes, excluding pump time (from approximately 400 torr toapproximately 10⁻⁸ torr), the formation in a chamber separate from MOCVDchamber 1 increases throughput of cluster tool 200. For example,overall, the cycle time for fabricating LED structure 220 in clustertool 200 is once again dictated by the cycle time of un-doped and/orn-type gallium nitride MOCVD reaction chamber 204, which is reduced toapproximately 3 hours versus the benchmark system of 4.5 hours. As such,the progressive growth of the structure 220 with one PVD chamber inaddition to three MOCVD chambers results in much less idle time for theMQW MOCVD reaction chamber 206 and the p-type gallium nitride MOCVDreaction chamber 208, improving the overall throughput of the system200. For example, in one embodiment, tool throughput is improved fromapproximately 5.3 runs per day to approximately 8 runs per day,demonstrating an approximately 50% throughput improvement.

Referring again to FIG. 2A, a representative temperature versus timeplot 250 for LED structure fabrication in cluster tool 200 is provided.Region 252 of plot 250 is specific to the formation of un-doped/n-typegallium nitride combination or n-type gallium nitride-only layer 226formed in un-doped and/or n-type gallium nitride MOCVD reaction chamber204. In this region, only one temperature ramp (ramp down fromapproximately 1100 degrees Celsius to approximately 400 degrees Celsius)is needed. Such a single ramp event requirement is in stark contrast tothe timing sequence for the formation of the buffer layer 124 and theun-doped/n-type gallium nitride combination layer 126 in un-doped and/orn-type gallium nitride MOCVD reaction chamber 102, as described above.In that case, the chamber starts at a high temperature for substratetreatment, ramps down in temperature for buffer layer fabrication, rampsback up in temperature for the gallium nitride deposition, and finallydown again for stabilization. It is noted that in both cases, however,the region 254 and 256 of plot 250 specific to the formation of the MQWand the p-GaN, will be approximately the same. In an embodiment,referring to region 258 of plot 250, the temperature versus time plotfor PVD-formed aluminum nitride could encompass either a hightemperature (HT) or low temperature (LT) process, approximately in therange of 20-1200 degrees Celsius.

In addition to the throughput improvement for cluster tool 200, theremay be additional benefits to a PVD chamber plus three MOCVD chambertool arrangement. For example, cost savings may be achieved since lessreaction gas may need to be delivered to the first MOCVD chamber. PVDchamber engineering and design may be simpler compared withconfiguration time and complexity for an MOCVD chamber dedicated to botha buffer layer and a device layer, as is chamber 102 of benchmarkcluster tool 100. In the case that the above process enables a reducedthickness for the un-doped gallium nitride portion of device layer 226,simpler down-the-line etch-back processes may be performed. This mayalso enable the saving of material and operation cost while reducingcycle time. Also, by using an aluminum nitride buffer layer in place ofa gallium nitride buffer layer, reduced defectivity in the active layersof a device, such as an LED device, may be achieved.

Thus, in accordance with an embodiment of the present invention, amulti-chamber system includes a PVD chamber having an aluminum nitridetarget, and a first MOCVD chamber to deposit un-doped or n-type galliumnitride. The multi-chamber system also includes a second MOCVD chamberto deposit a multiple quantum well (MQW) structure, and a third MOCVDchamber to deposit p-type aluminum gallium nitride or p-type galliumnitride, or both. In one embodiment, the PVD chamber having the aluminumnitride target is for non-reactive sputtering of aluminum nitride. In aspecific such embodiment, the PVD chamber is for non-reactive sputteringof aluminum nitride at a low or slightly elevated temperatureapproximately in the range of 20-200 degrees Celsius. In anotherspecific such embodiment, the PVD chamber is for non-reactive sputteringof aluminum nitride at a high temperature approximately in the range of200-1200 degrees Celsius.

It may be the case that regardless of deposition temperature, a PVDdeposited aluminum nitride layer suitable for inclusion in LED structure220 may need to be, at some point, exposed to a high temperatureapproximately in the range of 400-1400 degrees Celsius, e.g., about 900degrees Celsius, in order to achieve requisite material properties(e.g., appropriate defect density, crystal grain size, crystalorientation, etc.). In accordance with an embodiment of the presentinvention, a rapid thermal processing (RTP) process is performed on thePVD deposited aluminum nitride layer prior to fabrication of additionallayers on the aluminum nitride layer. An RTP chamber may, then, in someway be associated with the above described fabrication process for LEDstructure 220. In one embodiment, a tool, such as a cluster tool orin-line tool including the PVD and three MOCVD chambers also includes aRTP chamber. In an alternative embodiment, however, an RTP process isperformed in the PVD chamber. In another alternative embodiment, a laserannealing capability is associated with the above described fabricationprocess for LED structure 220.

In another aspect of the present invention, methods of fabricatinggallium nitride-based LEDs with PVD-formed aluminum nitride bufferlayers are provided. For example, FIG. 3 is a Flowchart 300 representingoperations in a method of fabricating a gallium nitride-based light LEDwith a PVD-formed aluminum nitride buffer layer, in accordance with anembodiment of the present invention.

Referring to operation 302 of Flowchart 300, a method includes formingan aluminum nitride layer above a substrate in a PVD chamber. Forexample, an aluminum nitride layer may be formed in a chamber such aschamber 202 of cluster tool 200. In one embodiment, forming the aluminumnitride layer includes sputtering from an aluminum nitride target housedin the PVD chamber. In one embodiment, forming the aluminum nitridelayer includes performing the forming at a low to slightly elevatedsubstrate temperature approximately in the range of 20-200 degreesCelsius. In one embodiment, forming the aluminum nitride layer includesperforming the forming at a high substrate temperature approximately inthe range of 200-1200 degrees Celsius.

Referring to operation 304 of Flowchart 300, the method includes formingan un-doped or n-type gallium nitride layer on the aluminum nitridelayer. For example, an un-doped or n-type gallium nitride layer may beformed in a chamber such as chamber 204 of cluster tool 200. In oneembodiment, forming the un-doped or n-type gallium nitride layerincludes performing the forming in a MOCVD chamber. In one embodiment,forming the un-doped or n-type gallium nitride layer includes performingthe forming in a HVPE chamber. In one embodiment, the method furtherincludes, prior to forming the un-doped or n-type gallium nitride layeron the aluminum nitride layer, annealing the aluminum nitride layer in aRTP chamber.

Referring to operation 306 of Flowchart 300, the method also includesforming a MQW structure above the un-doped or n-type gallium nitridelayer. For example, a MQW structure may be formed in a chamber such aschamber 206 of cluster tool 200. In one embodiment, the MQW structure iscomposed of one or a plurality of field pairs of InGaN well/GaN barriermaterial layers.

Referring to operation 308 of Flowchart 300, the method further includesforming a p-type aluminum gallium nitride or p-type gallium nitridelayer above the MQW structure. For example, the p-type aluminum galliumnitride or p-type gallium nitride layer may be formed in a chamber suchas chamber 208 of cluster tool 200.

Exemplary embodiments of tool platforms suitable for housing a PVDchamber along with three MOCVD chambers include an Opus™ AdvantEdge™system or a Centura™ system, both commercially available from AppliedMaterials, Inc. of Santa Clara, Calif. Embodiments of the presentinvention further include an integrated metrology (IM) chamber as acomponent of the multi-chambered processing platform. The IM chamber mayprovide control signals to allow adaptive control of integrateddeposition process, such as the multiple segmented sputter or epitaxialgrowth processes described above in association with FIG. 3. The IMchamber may include a metrology apparatus suitable to measure variousfilm properties, such as thickness, roughness, composition, and mayfurther be capable of characterizing grating parameters such as criticaldimensions (CD), sidewall angle (SWA), feature height (HT) under vacuumin an automated manner. Examples include, but are not limited to,optical techniques like reflectometry and scatterometry. In particularlyadvantageous embodiments, in-vacuo optical CD (OCD) techniques areemployed where the attributes of a grating formed in a starting materialare monitored as the sputter and/or epitaxial growth proceeds. In otherembodiments, metrology operations are performed in a process chamber,e.g., in-situ in the process chamber, rather than in a separate IMchamber.

A multi-chambered processing platform, such as cluster tool 200 mayfurther include an optional substrate aligner chamber, as well as loadlock chambers holding cassettes, coupled to a transfer chamber includinga robotic handler. In one embodiment of the present invention, adaptivecontrol of the multi-chambered processing platform 200 is provided by acontroller. The controller may be one of any form of general-purposedata processing system that can be used in an industrial setting forcontrolling the various subprocessors and subcontrollers. Generally, thecontroller includes a central processing unit (CPU) in communicationwith a memory and an input/output (I/O) circuitry, among other commoncomponents. As an example, the controller may perform or otherwiseinitiate one or more of the operations of any of the methods/processesdescribed herein, including the method described in association withFlowchart 300. Any computer program code that performs and/or initiatessuch operations may be embodied as a computer program product. Eachcomputer program product described herein may be carried by a mediumreadable by a computer (e.g., a floppy disc, a compact disc, a DVD, ahard drive, a random access memory, etc.).

Suitable PVD chambers for the processes and tool configurationscontemplated herein may include the Endura PVD system, commerciallyavailable from Applied Materials, Inc. of Santa Clara, Calif. The EnduraPVD system provides superior electromigration resistance and surfacemorphology as well as low cost of ownership and high system reliability.PVD processes performed therein may be done so at requisite pressuresand suitable target-to-wafer distance which creates directional flux ofdeposited species in the process cavity. Chambers compatible within-line systems such as the ARISTO chamber, also commercially availablefrom Applied Materials, Inc. of Santa Clara, Calif., provides automatedloading and unloading capabilities, as well as a magnetic carriertransport system, permitting significantly reduced cycle times. TheAKT-PiVot 55 KV PVD system, also commercially available from AppliedMaterials, Inc. of Santa Clara, Calif., has a vertical platform forsputtering deposition. The AKT-PiVot system's module architecturedelivers significantly faster cycle time and enables a large variety ofconfigurations to maximize production efficiency. Unlike traditionalin-line systems, the AKT-PiVot's parallel processing capabilityeliminates bottlenecks caused by different process times for each filmlayer. The system's cluster-like arrangement also allows continuousoperation during individual module maintenance. The included rotarycathode technology enables nearly 3× higher target utilization ascompared with conventional systems. The PiVot system's depositionmodules feature a pre-sputter unit that enables target conditioningusing only one substrate, rather than up to 50 substrates that areneeded with other systems to achieve the same results.

An example of an MOCVD deposition chamber which may be suitable for useas one or more of MOCVD chambers 204, 206, or 208, described above, isillustrated and described with respect to FIG. 4. FIG. 4 is a schematiccross-sectional view of an MOCVD chamber according to an embodiment ofthe invention. Exemplary systems and chambers that may be adapted topractice the present invention are described in U.S. patent applicationSer. No. 11/404,516, filed on Apr. 14, 2006, and Ser. No. 11/429,022,filed on May 5, 2006, both of which are incorporated by reference intheir entireties.

The apparatus 4100 shown in FIG. 4 includes a chamber 4102, a gasdelivery system 4125, a remote plasma source 4126, and a vacuum system4112. The chamber 4102 includes a chamber body 4103 that encloses aprocessing volume 4108. A showerhead assembly 4104 is disposed at oneend of the processing volume 4108, and a substrate carrier 4114 isdisposed at the other end of the processing volume 4108. A lower dome4119 is disposed at one end of a lower volume 4110, and the substratecarrier 4114 is disposed at the other end of the lower volume 4110. Thesubstrate carrier 4114 is shown in process position, but may be moved toa lower position where, for example, the substrates 4140 may be loadedor unloaded. An exhaust ring 4120 may be disposed around the peripheryof the substrate carrier 4114 to help prevent deposition from occurringin the lower volume 4110 and also help direct exhaust gases from thechamber 4102 to exhaust ports 4109. The lower dome 4119 may be made oftransparent material, such as high-purity quartz, to allow light to passthrough for radiant heating of the substrates 4140. The radiant heatingmay be provided by a plurality of inner lamps 4121A and outer lamps4121B disposed below the lower dome 4119, and reflectors 4166 may beused to help control chamber 4102 exposure to the radiant energyprovided by inner and outer lamps 4121A, 4121B. Additional rings oflamps may also be used for finer temperature control of the substrate4140.

The substrate carrier 4114 may include one or more recesses 4116 withinwhich one or more substrates 4140 may be disposed during processing. Thesubstrate carrier 4114 may carry six or more substrates 4140. In oneembodiment, the substrate carrier 4114 carries eight substrates 4140. Itis to be understood that more or less substrates 4140 may be carried onthe substrate carrier 4114. Typical substrates 4140 may includesapphire, silicon carbide (SiC), silicon, or gallium nitride (GaN). Itis to be understood that other types of substrates 4140, such as glasssubstrates 4140, may be processed. Substrate 4140 size may range from 50mm-100 mm in diameter or larger. The substrate carrier 4114 size mayrange from 200 mm-750 mm. The substrate carrier 4114 may be formed froma variety of materials, including SiC or SiC-coated graphite. It is tobe understood that substrates 4140 of other sizes may be processedwithin the chamber 4102 and according to the processes described herein.The showerhead assembly 4104 may allow for more uniform depositionacross a greater number of substrates 4140 and/or larger substrates 4140than in traditional MOCVD chambers, thereby increasing throughput andreducing processing cost per substrate 4140.

The substrate carrier 4114 may rotate about an axis during processing.In one embodiment, the substrate carrier 4114 may be rotated at about 2RPM to about 100 RPM. In another embodiment, the substrate carrier 4114may be rotated at about 30 RPM. Rotating the substrate carrier 4114 aidsin providing uniform heating of the substrates 4140 and uniform exposureof the processing gases to each substrate 4140.

The plurality of inner and outer lamps 4121A, 4121B may be arranged inconcentric circles or zones (not shown), and each lamp zone may beseparately powered. In one embodiment, one or more temperature sensors,such as pyrometers (not shown), may be disposed within the showerheadassembly 4104 to measure substrate 4140 and substrate carrier 4114temperatures, and the temperature data may be sent to a controller (notshown) which can adjust power to separate lamp zones to maintain apredetermined temperature profile across the substrate carrier 4114. Inanother embodiment, the power to separate lamp zones may be adjusted tocompensate for precursor flow or precursor concentration non-uniformity.For example, if the precursor concentration is lower in a substratecarrier 4114 region near an outer lamp zone, the power to the outer lampzone may be adjusted to help compensate for the precursor depletion inthis region.

The inner and outer lamps 4121A, 4121B may heat the substrates 4140 to atemperature of about 400 degrees Celsius to about 1200 degrees Celsius.It is to be understood that the invention is not restricted to the useof arrays of inner and outer lamps 4121A, 4121B. Any suitable heatingsource may be utilized to ensure that the proper temperature isadequately applied to the chamber 4102 and substrates 4140 therein. Forexample, in another embodiment, the heating source may include resistiveheating elements (not shown) which are in thermal contact with thesubstrate carrier 4114.

A gas delivery system 4125 may include multiple gas sources, or,depending on the process being run, some of the sources may be liquidsources rather than gases, in which case the gas delivery system mayinclude a liquid injection system or other means (e.g., a bubbler) tovaporize the liquid. The vapor may then be mixed with a carrier gasprior to delivery to the chamber 4102. Different gases, such asprecursor gases, carrier gases, purge gases, cleaning/etching gases orothers may be supplied from the gas delivery system 4125 to separatesupply lines 4131, 4132, and 4133 to the showerhead assembly 4104. Thesupply lines 4131, 4132, and 4133 may include shut-off valves and massflow controllers or other types of controllers to monitor and regulateor shut off the flow of gas in each line.

A conduit 4129 may receive cleaning/etching gases from a remote plasmasource 4126. The remote plasma source 4126 may receive gases from thegas delivery system 4125 via supply line 4124, and a valve 4130 may bedisposed between the showerhead assembly 4104 and remote plasma source4126. The valve 4130 may be opened to allow a cleaning and/or etchinggas or plasma to flow into the showerhead assembly 4104 via supply line4133 which may be adapted to function as a conduit for a plasma. Inanother embodiment, apparatus 4100 may not include remote plasma source4126 and cleaning/etching gases may be delivered from gas deliverysystem 4125 for non-plasma cleaning and/or etching using alternatesupply line configurations to shower head assembly 4104.

The remote plasma source 4126 may be a radio frequency or microwaveplasma source adapted for chamber 4102 cleaning and/or substrate 4140etching. Cleaning and/or etching gas may be supplied to the remoteplasma source 4126 via supply line 4124 to produce plasma species whichmay be sent via conduit 4129 and supply line 4133 for dispersion throughshowerhead assembly 4104 into chamber 4102. Gases for a cleaningapplication may include fluorine, chlorine or other reactive elements.

In another embodiment, the gas delivery system 4125 and remote plasmasource 4126 may be suitably adapted so that precursor gases may besupplied to the remote plasma source 4126 to produce plasma specieswhich may be sent through showerhead assembly 4104 to deposit CVDlayers, such as films, for example, on substrates 4140.

A purge gas (e.g., nitrogen) may be delivered into the chamber 4102 fromthe showerhead assembly 4104 and/or from inlet ports or tubes (notshown) disposed below the substrate carrier 4114 and near the bottom ofthe chamber body 4103. The purge gas enters the lower volume 4110 of thechamber 4102 and flows upwards past the substrate carrier 4114 andexhaust ring 4120 and into multiple exhaust ports 4109 which aredisposed around an annular exhaust channel 4105. An exhaust conduit 4106connects the annular exhaust channel 4105 to a vacuum system 4112 whichincludes a vacuum pump (not shown). The chamber 4102 pressure may becontrolled using a valve system 4107 which controls the rate at whichthe exhaust gases are drawn from the annular exhaust channel 4105.

An example of a HVPE deposition chamber which may be suitable for use asthe HVPE chamber 204 of alternative embodiments of chamber 204,described above, is illustrated and described with respect to FIG. 5.FIG. 5 is a schematic cross-sectional view of a HVPE chamber 500suitable for the fabrication of group III-nitride materials, inaccordance with an embodiment of the present invention.

The apparatus 500 includes a chamber 502 enclosed by a lid 504.Processing gas from a first gas source 510 is delivered to the chamber502 through a gas distribution showerhead 506. In one embodiment, thegas source 510 includes a nitrogen containing compound. In anotherembodiment, the gas source 510 includes ammonia. In one embodiment, aninert gas such as helium or diatomic nitrogen is introduced as welleither through the gas distribution showerhead 506 or through the walls508 of the chamber 502. An energy source 512 may be disposed between thegas source 510 and the gas distribution showerhead 506. In oneembodiment, the energy source 512 includes a heater. The energy source512 may break up the gas from the gas source 510, such as ammonia, sothat the nitrogen from the nitrogen containing gas is more reactive.

To react with the gas from the first source 510, precursor material maybe delivered from one or more second sources 518. The precursor may bedelivered to the chamber 502 by flowing a reactive gas over and/orthrough the precursor in the precursor source 518. In one embodiment,the reactive gas includes a chlorine containing gas such as diatomicchlorine. The chlorine containing gas may react with the precursorsource to form a chloride. In order to increase the effectiveness of thechlorine containing gas to react with the precursor, the chlorinecontaining gas may snake through the boat area in the chamber 532 and beheated with the resistive heater 520. By increasing the residence timethat the chlorine containing gas is snaked through the chamber 532, thetemperature of the chlorine containing gas may be controlled. Byincreasing the temperature of the chlorine containing gas, the chlorinemay react with the precursor faster. In other words, the temperature isa catalyst to the reaction between the chlorine and the precursor.

In order to increase the reactivity of the precursor, the precursor maybe heated by a resistive heater 520 within the second chamber 532 in aboat. The chloride reaction product may then be delivered to the chamber502. The reactive chloride product first enters a tube 522 where itevenly distributes within the tube 522. The tube 522 is connected toanother tube 524. The chloride reaction product enters the second tube524 after it has been evenly distributed within the first tube 522. Thechloride reaction product then enters into the chamber 502 where itmixes with the nitrogen containing gas to form a nitride layer on asubstrate 516 that is disposed on a susceptor 514. In one embodiment,the susceptor 514 includes silicon carbide. The nitride layer mayinclude n-type gallium nitride for example. The other reaction products,such as nitrogen and chlorine, are exhausted through an exhaust 526.

The above described approaches and multi-chamber arrangements are notlimited to a single PVD deposition operation or a single PVD depositionchamber. For example, prior to PVD aluminum nitride formation, a PVDtungsten film may be formed to effectively provide a metalizedsubstrate. For example, FIG. 6 illustrates a cross-sectional view of agallium nitride (GaN)-based light-emitting diode (LED) formed on ametalized substrate, in accordance with an embodiment of the presentinvention.

Referring to FIG. 6, a LED structure 600 includes a stack of variousmaterial layers, many of which include III-V materials. For example, theLED structure 600 includes a silicon or sapphire substrate 602(Substrate: sapphire, Si) and an approximately 10-200 nanometer thicktungsten layer 604 (PVD-W). The LED structure 600 also includes a thin,e.g., less than approximately 25 nanometers, aluminum nitride layer 606(e.g., PVD AlN). The aluminum nitride layer 224 may be formed by lowtemperature or high temperature sputter deposition in the PVD aluminumnitride sputter chamber 202 of cluster tool 200. The LED structure 600also includes an approximately 4 microns thick un-doped/n-type galliumnitride combination or n-type gallium nitride-only layer 608 (n-GaN).The un-doped/n-type gallium nitride combination or n-type galliumnitride-only layer 608 may be formed in un-doped and/or n-type galliumnitride MOCVD reaction chamber 204 of cluster tool 200. An MQW structure610 with a thickness in the range of 150-300 nanometers is alsoincluded. The MQW structure 610 may be formed in MQW MOCVD reactionchamber 206 of cluster tool 200. In one embodiment, the MQW structure610 is composed of one or a plurality of field pairs of InGaN well/GaNbarrier material layers. The LED structure 600 also includes anapproximately 20 nanometers thick p-type gallium aluminum nitride layer612 (p-AlGaN) and a p-type gallium nitride layer 614 with a thickness inthe range of 50-200 nanometers (p-GaN). The p-type gallium aluminumnitride layer 612 and the p-type gallium nitride layer 614 may be formedin p-type gallium nitride MOCVD reaction chamber 208 of cluster tool200. It is to be understood that the above thicknesses or thicknessranges are exemplary embodiments, and that other suitable thicknesses orthickness ranges are also considered within the spirit and scope ofembodiments of the present invention.

In an embodiment, the tungsten layer 604 is formed by a PVD processdistinct from the PVD process used to form the aluminum nitride layer606. For example in one embodiment, the method described in associationwith Flowchart 300 further includes, prior to forming the aluminumnitride layer, forming a tungsten (W) layer above the substrate in asecond PVD chamber having a tungsten target. In one embodiment, one ormore of the possible systems (in-line or cluster) described inassociation with multi-chamber system 200 further includes a second PVDchamber having a tungsten (W) target housed therein. In an alternativeembodiment, a single PVD chamber houses both an aluminum nitride targetand a tungsten target. In one such embodiment, the single PVD chamber isused to deposit, sequentially, both the tungsten layer 604 and thealuminum nitride layer 606.

By including a metal layer, such as a PVD deposited tungsten layerbetween a receiving substrate and the PVD aluminum layer, any strainotherwise existing as a result of the proximity of the aluminum nitridelayer and the receiving substrate may be mitigated or eliminated. Also,although silicon substrate embodiments are readily contemplated in theabove description, inclusion of such a tungsten intermediate layer mayfurther improve the compatibility of silicon substrates with groupmaterial processing thereon. Other benefits may be with respect toprocessing enablement. For example, the relative easy of wet etchingtungsten selective to group III-V material layers and to silicon andsapphire substrates may make patterning and transfer of such stacks moreaccessible.

LEDs and related devices may be fabricated from layers of, e.g., groupIII-V films, especially group III-nitride films. Some embodiments of thepresent invention relate to forming gallium nitride (GaN) layers in adedicated chamber of a fabrication tool, such as in a dedicated MOCVDchamber. In some embodiments of the present invention, GaN is a binaryGaN film, but in other embodiments, GaN is a ternary film (e.g., InGaN,AlGaN) or is a quaternary film (e.g., InAlGaN). In at least someembodiments, the group III-nitride material layers are formedepitaxially. They may be formed directly on a substrate or on a bufferslayer disposed on a substrate. Other contemplated embodiments includep-type doped gallium nitride layers deposited directly on PVD-formedbuffer layers, e.g., PVD-formed aluminum nitride.

It is to be understood that embodiments of the present invention are notlimited to formation of layers on the select substrates described above.Other embodiments may include the use of any suitable non-patterned orpatterned single crystalline substrate upon which a high qualityaluminum nitride layer may be sputter-deposited, e.g., in a non-reactivePVD approach. The substrate may be one such as, but not limited to, asapphire (Al₂O₃) substrate, a silicon (Si) substrate, a silicon carbide(SiC) substrate, a silicon on diamond (SOD) substrate, a quartz (SiO₂)substrate, a glass substrate, a zinc oxide (ZnO) substrate, a magnesiumoxide (MgO) substrate, and a lithium aluminum oxide (LiAlO₂) substrate.Any well know method, such as masking and etching may be utilized toform features, such as posts, from a planar substrate to create apatterned substrate. In a specific embodiment, however, a patternedsapphire substrate (PSS) is used with a (0001) orientation. Patternedsapphire substrates may be ideal for use in the manufacturing of LEDsbecause they increase the light extraction efficiency which is extremelyuseful in the fabrication of a new generation of solid state lightingdevices. Substrate selection criteria may include lattice matching tomitigate defect formation and coefficient of thermal expansion (CTE)matching to mitigate thermal stresses.

As described above, the group III-nitride films can be doped. The groupIII-nitride films can be p-typed doped using any p-type dopant such asbut not limited Mg, Be, Ca, Sr, or any Group I or Group II element havetwo valence electrons. The group III-nitride films can be p-type dopedto a conductivity level of between 1×10¹⁶ to 1×10²⁰ atoms/cm³. The groupIII-nitride films can be n-typed doped using any n-type dopant such asbut not limited silicon or oxygen, or any suitable Group IV or Group VIelement. The group III-nitride films can be n-type doped to aconductivity level of between 1×10¹⁶ to 1×10²⁰ atoms/cm³.

It is to be understood that the above processes may be performed in adedicated chamber within a cluster tool, or other tool with more thanone chamber, e.g. an in-line tool arranged to have a dedicated chamberfor fabricating layers of an LED. It is also to be understood thatembodiments of the present invention need not be limited to thefabrication of LEDs. For example, in another embodiment, devices otherthan LED devices may be fabricated by approaches described herein, suchas but not limited to field-effect transistor (FET) devices. In suchembodiments, there may not be a need for a p-type material on top of astructure of layers. Instead, an n-type or un-doped material may be usedin place of the p-type layer. It is also to be understood that multipleoperations, such as various combinations of depositing and/or thermalannealing, may be performed in a single process chamber.

Thus, fabrication of gallium nitride-based LEDs with PVD-formed aluminumnitride buffer layers has been disclosed. In accordance with anembodiment of the present invention, a multi-chamber system includes aPVD chamber having a target composed of a material including aluminum. Achamber adapted to deposit un-doped or n-type gallium nitride, or both,is also included in the multi-chamber system. In one embodiment, thetarget of the PVD chamber is composed of aluminum nitride. In oneembodiment, the chamber adapted to deposit un-doped or n-type galliumnitride is a MOCVD chamber. In one embodiment, the PVD chamber and thechamber adapted to deposit un-doped or n-type gallium nitride areincluded in a cluster or an in-line tool arrangement.

What is claimed is:
 1. A multi-chamber system, comprising: a physicalvapor deposition (PVD) chamber having a target comprising aluminum; anda chamber adapted to deposit un-doped or n-type gallium nitride, orboth.
 2. The system of claim 1, wherein the target of the PVD chambercomprises aluminum nitride.
 3. The system of claim 1, wherein thechamber adapted to deposit un-doped or n-type gallium nitride comprisesa metal-organic chemical vapor deposition (MOCVD) chamber.
 4. The systemof claim 1, wherein the chamber adapted to deposit un-doped or n-typegallium nitride comprises a hydride vapor phase epitaxy (HVPE) chamber.5. The system of claim 1, wherein the PVD chamber and the chamberadapted to deposit un-doped or n-type gallium nitride are included in acluster tool arrangement.
 6. The system of claim 1, wherein the PVDchamber and the chamber adapted to deposit un-doped or n-type galliumnitride are included in an in-line tool arrangement.
 7. The system ofclaim 1, further comprising: a rapid thermal processing (RTP) chamber ora laser annealing chamber.
 8. A multi-chamber system, comprising: aphysical vapor deposition (PVD) chamber having a target comprisingaluminum; a first metal-organic chemical vapor deposition (MOCVD)chamber to deposit un-doped or n-type gallium nitride; a second MOCVDchamber to deposit a multiple quantum well (MQW) structure; and a thirdMOCVD chamber to deposit p-type aluminum gallium nitride or p-typegallium nitride, or both.
 9. The system of claim 8, wherein the PVDchamber having the aluminum nitride target is for non-reactivesputtering of aluminum nitride.
 10. The system of claim 9, wherein thePVD chamber is for non-reactive sputtering of aluminum nitride at atemperature approximately in the range of 20-200 degrees Celsius. 11.The system of claim 9, wherein the PVD chamber is for non-reactivesputtering of aluminum nitride at a temperature approximately in therange of 200-1200 degrees Celsius.
 12. The system of claim 8, furthercomprising: a rapid thermal processing (RTP) chamber or a laserannealing chamber.
 13. The system of claim 8, further comprising: asecond PVD chamber having a tungsten (W) target.